发明名称 |
Catoptric projection optical system |
摘要 |
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of -0.14 or smaller.
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申请公布号 |
US7070289(B2) |
申请公布日期 |
2006.07.04 |
申请号 |
US20040783788 |
申请日期 |
2004.02.20 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SASAKI TAKAHIRO;SUNAGA TOSHIHIRO;HATAKEYAMA KOSHI |
分类号 |
G02B5/10;G21K1/06;G02B17/06;G02B17/08;G02B27/18;G03F7/20;G21K5/00;G21K5/02;H01L21/027 |
主分类号 |
G02B5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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