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发明名称
GAS INJECTOR OF CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号
KR20060075329(A)
申请公布日期
2006.07.04
申请号
KR20040114103
申请日期
2004.12.28
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
SHIN, CHUL HO
分类号
C23C16/00
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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