PIEZOELECTRIC DEVICE, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC PUMP, INKJET RECORDING HEAD, INKJET PRINTER, SURFACE ACOUSTIC WAVE DEVICE, THIN-FILM PIEZOELECTRIC RESONATOR, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, AND ELECTRONIC INSTRUMENT

摘要

A piezoelectric device includes: a substrate (1); a first conductive layer (4) formed over the substrate, the first conductive layer including at least one buffer layer (41) formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer (5) formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer (6) electrically connected with the piezoelectric layer.