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发明名称
ASSEMBLING-TYPED APPARATUS FOR PROTECTING A CHAMBER FROM EVAVOPRATED MATERIAL
摘要
申请公布号
KR20060075742(A)
申请公布日期
2006.07.04
申请号
KR20040114626
申请日期
2004.12.29
申请人
LG ELECTRONICS INC.
发明人
JANG, CHUL YOUNG
分类号
H01L21/02;H01L21/205
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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