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发明名称
WET CLEANING SYSTEM
摘要
申请公布号
KR20060075349(A)
申请公布日期
2006.07.04
申请号
KR20040114126
申请日期
2004.12.28
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
HAN, YOUNG SOO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
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地址
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