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发明名称
APPARATUS OF BAKING FOR SEMICONDUCTOR FABRICATION AND METHOD OF THE SAME
摘要
申请公布号
KR20060076458(A)
申请公布日期
2006.07.04
申请号
KR20040114876
申请日期
2004.12.29
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
HA, JEONG HYUK
分类号
H01L21/027;H01L21/324
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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