PLASMA ETCHING APPARATUS,申请号KR19990047134-传众专利搜索

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发明名称	PLASMA ETCHING APPARATUS
摘要
申请公布号	KR100596769(B1)	申请公布日期	2006.07.04
申请号	KR19990047134	申请日期	1999.10.28
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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