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发明名称
SUPPLEMENT AGENT FOR CHEMICAL MECHANICAL POLISHING SLURRY
摘要
申请公布号
KR20060076190(A)
申请公布日期
2006.07.04
申请号
KR20050113758
申请日期
2005.11.25
申请人
LG CHEM. LTD.
发明人
YI, GI RA;KIM, JONG PIL;LEE, JUNG HEE;HONG, JEONG JIN;HONG, YOUNG JUN;KIM, NO MA;LEE, AN NA
分类号
C09K3/14;B24B37/00;C09K3/18;H01L21/304
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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