发明名称 Thermo-optical device
摘要 A polymer well may be formed over a thermal oxide formed over a semiconductor substrate in one embodiment. The well may include a waveguide and a pair of heaters adjacent the waveguide. Each heater may be mounted on a platform of insulating material to reduce heat loss through the substrate and the thermal oxide, in one embodiment.
申请公布号 US7071492(B2) 申请公布日期 2006.07.04
申请号 US20030609839 申请日期 2003.06.30
申请人 INTEL CORPORATION 发明人 LI RUOLIN;TRAN UT
分类号 H01L27/15;G02F1/01;G02F1/065 主分类号 H01L27/15
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