发明名称 High-pressure delivery system for ultra high purity liquid carbon dioxide
摘要 This invention relates to an improvement in a process and apparatus for delivering ultra high purity liquid carbon dioxide to a point of use at pressures above ambient without pumping. In the process a high purity carbon dioxide feed is charged to a vessel and at least partially solidified. Once filled, the slush or solid is isochorically heated, i.e., heated at constant vessel volume whereby the solid phase carbon dioxide is converted to a liquid. Liquid, then, is withdrawn from the vessel at a desired pressure at a rate at which the solid phase carbon dioxide is converted to a liquid. The improvement resides in effecting partial solidification and recycle of carbon dioxide.
申请公布号 US7069742(B2) 申请公布日期 2006.07.04
申请号 US20040760677 申请日期 2004.01.19
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 GERSHTEIN VLADIMIR YLIY
分类号 C01B31/20;F25J3/00;B01D9/04;B25J1/00;C02F1/22;F17C5/04;F17C5/06;F17C7/00;F17C9/02;F17D1/08;F25J1/00;G05D16/00;H01L21/02 主分类号 C01B31/20
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