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发明名称
制备半导体元件之电容器的方法
摘要
一种制备半导体元件之电容器的方法,包括在有着贮存节点插栓半导体基板上形成一个第一个绝缘层;在有着第一个绝缘层的半导体基板上接续地形成蚀刻停止层和第二绝缘层;透过利用蚀刻停止层而选择性地蚀刻第二绝缘层的方式形成一个暴露一部份之贮存节点插栓的洞;使贮存节点插栓因为洞而暴露的部分内凹;在此内凹的贮存节点插栓的表面上形成一个屏障金属层;形成一个透过洞内的屏障金属层连接到贮存节点插栓的贮存节点电极;以及在贮存节点电极上接续地形成一介电质层和一个盘电极的金属层。
申请公布号
TW200623338
申请公布日期
2006.07.01
申请号
TW094119636
申请日期
2005.06.14
申请人
海力士半导体股份有限公司
发明人
崔亨福;朴钟范;李起正;李钟旼
分类号
H01L21/8242;H01L27/108
主分类号
H01L21/8242
代理机构
代理人
郑再钦
主权项
地址
韩国
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