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发明名称
导电性之光微影用聚合物以及使用彼来制造装置的方法
摘要
一种导电性光微影膜及使用该导电性光微影膜形成装置之方法。此方法包括将导电性光微影膜淀积于基板的上表面上;及使用光微影法将导电性光微影膜形成图案以制造出所欲之电路图案。此导电性光微影膜包含约50%至约60%一种环氧基丙烯酸酯、热固化剂和导电性聚合物之混合物;约20%至约30%之光微影用反应性组份;约10%至约15%之光活性材料;和约3%至约5%增进导电性光微影用聚合物之导电性的添加剂。
申请公布号
TW200622492
申请公布日期
2006.07.01
申请号
TW094128626
申请日期
2005.08.22
申请人
英特尔股份有限公司
发明人
罗贝卡 夏;陈聪瑜
分类号
G03F7/038;G03F7/09
主分类号
G03F7/038
代理机构
代理人
林志刚
主权项
地址
美国
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