| 摘要 |
<p>Light emitted from a light source ( 22 ) is used through a light projection optical system ( 23 ) to perform coaxial down-emission lighting on a measurement target ( 36 ). Light reflected by the measurement target ( 36 ) is formed on a photo-detector ( 26 ) through an image formation optical system ( 24 ). Along its optical path, a spectroscope ( 25 ) is provided for converting an image impinging on the photo-detector ( 26 ) into a spectroscopic image having a predetermined wavelength band. A measurement point extraction portion ( 32 ) in a signal processing portion ( 28 ) determines a predeterm film thickness measurement point from an image picked up by the photo-detector ( 26 ), extracts an image signal at the film thickness measurement point, and transmits t to film thickness operation portion ( 33 ). The film thickness operation portion ( 33 ) measured film thickness of a thin film, which is the measurement target ( 36 ), from this signal.</p> |
