METHOD OF CONTROLLING ELECTROSTATIC LENS AND ION IMPLANTATION APPARATUS,申请号KR20000066621-传众专利搜索

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发明名称	METHOD OF CONTROLLING ELECTROSTATIC LENS AND ION IMPLANTATION APPARATUS
摘要
申请公布号	KR100593968(B1)	申请公布日期	2006.06.30
申请号	KR20000066621	申请日期	2000.11.10
申请人		发明人
分类号	H01J37/21;C23C14/48;G01Q30/02;G01Q60/44;G21K1/08;H01J37/304;H01J37/317;H01L21/265	主分类号	H01J37/21
代理机构		代理人
主权项
地址

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