Micromachined accelerometer, has mobile and fixed electrodes comprising, respectively mobile and fixed fingers integrated by connection beams directly etched in substrate, where beams are placed near end of fingers to be integrated

摘要

The accelerometer has mobile and fixed electrodes (2, 4) relative to a substrate, with mobile and fixed fingers (7, 8A, 8B), respectively. Each mobile finger is disposed between two adjacent fixed fingers to form an interdigital comb microstructure. The mobile and fixed fingers are integrated by respective connection beams (20, 22) directly etched in the substrate. The beams are placed near the end of the fingers to be integrated. An independent claim is also included for a process of manufacturing an accelerometer.