Flat object e.g. microelectronic circuit, measuring method for object characterization, involves analyzing reflected excitation beam polarization for measurements of beam at azimuthal angles and characterizing model object with parameters

摘要

The method involves analyzing polarization of reflected excitation beam for each measurement of beam at azimuthal angles (phi 1, phi 2) to obtain experimental polarimetric data. Theoretical polarimetric data is calculated for a model object, of a real object, having adjustable parameters. The model object is characterized by iterative comparison of measurements with the theoretical data for different values of the parameters. The parameters of the model object are adjustable using a formalism of the electromagnetism. An independent claim is also included for a device for implementing the flat object measuring method.