Donor and receptor plates gluing surfaces treatment for fabricating silicon on insulator type substrate, involves cleaning and activating gluing surfaces by applying activation solution, on surfaces

摘要

The method involves cleaning and activating gluing surfaces (12, 22) of donor plate (10) and a receptor plate (20) made up of silicon by applying an activation solution, on the surfaces, comprising an ammonia solution in the deionized water, according to a mass concentration ranging between 0.05 and 2 percent. The donor plate and the receptor plate are glued. An independent claim is also included for a method to fabricate a structure used in an optical, electronic or optoelectronic domain.