| 摘要 |
PROBLEM TO BE SOLVED: To provide a board treatment device and a board treatment method, wherein a board can be dried while the formation of a watermark is restrained. SOLUTION: A mixer 21 mixes hot pure water which is increased in temperature by a hot water unit 31 with a hydrochloric acid to generate a treatment liquid. The generated treatment liquid is supplied to a treatment tub 3 through a treatment liquid pipe 15 and a common pipe 13. In this treatment tub 3, a board W retained by a lifter 1 is dipped in the treatment liquid. Thereafter, the lifter 1 is lifted to pull up the board W from the treatment liquid. When this takes place as a droplet adhered to the board W is acidic, an acidic reaction of the board W is restrained. That is, when the board W is dried, an oxide of the board W is not separated, and the formation of the watermark can be precluded. COPYRIGHT: (C)2006,JPO&NCIPI
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