发明名称 ULTRAVIOLET-RAY IRRADIATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an ultraviolet-ray irradiating apparatus capable of reducing its inert-gas feeding quantity. SOLUTION: The ultraviolet-ray irradiating apparatus has an ultraviolet-ray irradiating object 9 comprising a sheet 93 coated with an ultraviolet-ray-cured type bonding agent and a bonded member joined to the sheet, a mounting pedestal 2 for mounting thereon the ultraviolet-ray irradiating object of the ultraviolet-ray irradiating apparatus for irradiating ultraviolet rays on the sheet side, and a light emitting device. Also, the mounting surface of the mounting pedestal is constituted out of its outside-periphery supporting surface 21a, and in it, its downward recessed portion 21b is formed in the more-inside-periphery-side portion than the outside-periphery supporting surface. The bonded member has an opening portion 90a on the more-inside-periphery side than the outside-periphery portion thereof. Further, a gas feeding device for feeding an inert gas to the recessed portion is provided, and the inert gas is fed by the gas feeding device to an inner space H of the recessed portion covered with the ultraviolet-ray irradiating object in the state of mounting the ultraviolet-ray irradiating object. Moreover, the light emitting device is so constituted that it irradiates the ultraviolet rays on the sheet in the state wherein the exposed portion of the bonding agent to the recessed portion 21b is exposed to the inert gas via the opening portion. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006173450(A) 申请公布日期 2006.06.29
申请号 JP20040365876 申请日期 2004.12.17
申请人 TAKAHIRA IHITO 发明人 TAKAHIRA IHITO
分类号 H01L21/52;C09J5/00 主分类号 H01L21/52
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