| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum device capable of maintaining the capability of the vacuum device itself, and reducing the number of components for obtaining vacuum. SOLUTION: The vacuum device is provided with: a plurality of vacuum vessels continuously provided to each other via a gate valve; at least one carrier which is arranged in each vacuum vessel and movable between the vacuum vessels; a primary evacuation mechanism connected to each vacuum vessel, a vacuum forming mechanism connected to each vacuum vessel; and a sputtering gas feed mechanism to feed a sputtering gas to each vacuum vessel at least. The vacuum forming mechanism is provided with: one vacuum pump; and one intermediate vacuum vessel arranged between the vacuum pump and each vacuum vessel. COPYRIGHT: (C)2006,JPO&NCIPI
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