| 摘要 |
A highly reliable micro-resonator and communication apparatus is provided in which an influence on a substrate caused by an interaction generated by an oscillation between adjacent micro-resonant elements is eliminated. The micro-resonant element includes a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate, in which a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
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