| 摘要 |
The present invention provides a vibration sensor capable of preventing a diaphragm electrode from being damaged without lowering sensitivity as well as realizing a satisfactory assembling process. The vibration sensor comprises a fixed electrode 1 , and a diaphragm electrode 3 having a weight member 2 attached to a membrane surface facing away from the fixed electrode 1 and fixedly supported at peripheries thereof, the vibration sensor being capable of outputting variation of capacitance between the fixed electrode and the diaphragm electrode as vibration signals. The vibration sensor further comprises projecting portions 2 a formed on parts of an end portion of the weight member 2 to project along the direction of the membrane surface and spaced from the membrane surface of the diaphragm electrode 3 , and a restricting member 4 for contacting the projecting portions 2 a of the weight member 2 displaced along the direction of the membrane surface of the diaphragm electrode 3 , thereby to restrict displacement of the weight member 2.
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