| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light receiving unit capable of preventing the invasion of a liquid immersion material (liquid) and of detecting even light having a NA exceeding 1, and also to provide an exposing apparatus equipped with the light receiving unit. <P>SOLUTION: The light receiving unit equipped with a light receiving device for detecting light comprises a window member disposed on the side of the light receiving surface of the light receiving device and having translucency to the light, and deflection means for deflecting light transmitted through the window member. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
