| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter, with which foaming due to a liquid for removing development residues is prevented, neither filter clogging nor nozzle clogging is caused, and having little development residue. <P>SOLUTION: In the method for manufacturing a color filter, with which a transfer film obtained by disposing a photosensitive resin layer on a temporary support, is stuck to a hydrophobed support with the photosensitive resin layer inward, the temporary support is peeled, and pattern exposure and development are carried out to obtain a pattern for a color filter; and after the development, high-pressure water is sprayed onto the hydrophobed support, and then ashing is carried out. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
