| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize an electron emission element stably operating in the atmosphere, its manufacturing method, and a field electron emitting method using the element. <P>SOLUTION: By using a rare gas of argon, helium or the like, simple hydrogen or a mixed dilution gas of them, by generating plasma in an atmosphere with 0.0001-100 vol.% of a boron source and a nitrogen source material gas introduced into the dilution gas under pressure of 0.001-760 Torr, or without generating plasma, and by irradiating an electron emission element substrate kept at a room temperature to 1,300°C with an ultraviolet ray, a surface shape containing a material represented by BN, formed of sp<SP>3</SP>-bonding BN or a mixture of sp<SP>2</SP>binding BN and itself, having a pointed tip, and stably emitting electrons in the atmosphere by applying a voltage is formed in a self-forming manner, and the substrate is recovered. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
