| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved inspection device for inspecting a sample. SOLUTION: This inspection device has a radiation system constituted to provide a radiation beam, a beam splitter constituted to generate, from the radiation beam, the first illumination beam and the second illumination beam transmitted respectively toward a flat reference part of the sample and a pattern formation-finished part of the sample, and a beam detector constituted to detect a detection beam including recoupling of radiations scattered from the flat reference part and the pattern formation-finished part. COPYRIGHT: (C)2006,JPO&NCIPI
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