摘要 |
A lid unit for closing a container body of a thin-plate supporting container for use in storing semiconductor wafers therein is provided. A simplified attaching-and-detaching mechanism of the lid unit includes a locking member extending from the main body engageable with a receiving device on the container body; a guiding member that reaches the receiving device in a state in which the main body fits lightly in the container body, and guides the locking member into the receiving device; and a feed member that rotates by engaging with the locking member, extends the locking member from the main body to be engageable with the receiving device on the container body. A rotation region of the feed member is divided into a rotation region for engaging the locking member with the receiving device on the container body and fixing the lid unit to the container body, and a rotation region for further rotating the feed member and fixing the feed member with the lid unit fixed to the container body.
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