发明名称 CORROSION-PREVENTING COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a corrosion-preventing composition which prevents metallic aluminum or an aluminum alloy from corroding, when used together with liquids for peeling, removing, etching and cleaning an inorganic and organic substances on an electronic device, without adversely affecting the functions of those chemical liquids for peeling, removal, etching and cleaning. SOLUTION: This composition is a mixture composition comprising a fluoride and a cyclic amine, particularly two or more different cyclic amines from each other; or comprising a fluoride, a cyclic amine, and an alkylene amine and/or an alkanolamine. The composition can inhibits metallic aluminum or the aluminum alloy from corroding, when used together with other liquids for peeling, removing, etching and cleaning, without adversely affecting the functions of those chemical liquids. The cyclic amine includes, for instance, piperazine, morpholine and pyrrolidine. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006169553(A) 申请公布日期 2006.06.29
申请号 JP20040360314 申请日期 2004.12.13
申请人 TOSOH CORP 发明人 HARA YASUSHI;TAKAHASHI FUMIHARU;HAYASHI HIROAKI
分类号 C23F11/14;G03F7/42;H01L21/027 主分类号 C23F11/14
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