| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide device which can be easily manufactured and at a low cost, and which can perform stable optical transmission, and also which can improve the speed of the optical transmission, and to provide an optical waveguide module and an optoelectric composite device. <P>SOLUTION: In the optical waveguide device 1, optical waveguide layers 5 each of which is constituted of cores 3 and clads 4a, 4b which are formed by silicon oxidized films whose refractive indexes are different from each other are provided to a silicon substrate 2 and the refractive index of the silicon oxidized film as the clads is smaller than that of the silicon oxidized film as the core 3. In the optical waveguide module 8, the optical waveguide layers 5 and a light-receiving element constituting layer 9 deposited in a recessed part 10 which is provided by removing a part of the optical waveguide layer 5 are provided to the silicon substrate 2. As regards the optoelectric composite device 14, a semiconductor layer 17 is jointed to the silicon substrate 2 including the optical waveguide layers 5 and the light-receiving element 9 in the optical waveguide module 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
