发明名称 Capacitors having a horizontally folded dielectric layer and methods for manufacturing the same
摘要 Capacitors having a horizontally folded dielectric layer and methods of manufacturing is the same are provided. An example method for manufacturing a capacitor includes forming a first insulating layer pattern above a substrate, forming a first silicon epitaxial growth layer above a region of the silicon substrate exposed by the first insulating layer pattern through epitaxial growth of a first silicon layer, selectively etching the first insulating layer pattern, forming a dielectric layer pattern above the lateral surface of the first silicon epitaxial growth layer in a shape of a spacer, and forming a second silicon epitaxial growth layer above the silicon substrate through epitaxial growth of a second silicon layer. A capacitor including electrodes made of the first and second silicon epitaxial growth layers with the dielectric layer pattern formed therebetween may be formed by such a method.
申请公布号 US2006141733(A1) 申请公布日期 2006.06.29
申请号 US20050287675 申请日期 2005.11.28
申请人 WOO HYUK 发明人 WOO HYUK
分类号 H01L21/20 主分类号 H01L21/20
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