| 摘要 |
<P>PROBLEM TO BE SOLVED: To automatically determine measurement failure for a line width of a pattern or the like caused by a blurred image due to misfocusing when photographing the image, an indistinct image due to an image drift by charge or the like, as to a method for determining a measured value for determining quality of the measured value in measuring the line width or a line interval of the pattern on a measured object. <P>SOLUTION: This determination method has a step for acquiring a signal intensity distribution of the pattern on the measured object, a step for detecting an edge position of the pattern from the acquired signal intensity distribution, a step for detecting a taper width of an edge portion of the pattern from the acquired signal intensity distribution, and a step for determining whether the measured value based on the detected edge position is correct or not, when the detected taper width is within a preset range. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
