| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a multilayered piezoelectric element which can easily form a recess on the side face of the multilayered piezoelectric element without having a bad influence on the burning of a green laminate. <P>SOLUTION: In manufacturing the multilayered piezoelectric element having a slit-like recess in the side face, a plurality of green sheets are formed in a first place. Then, second or third higher harmonic laser light is irradiated on several green sheets from a YAG laser to form a slit hole for forming the slit-like recess in the green sheets. Meanwhile, an internal electrode is formed on the top face of other several green sheets. Simple green sheets, green sheets formed with the slit hole, and green sheets formed with the internal electrodes are stacked by a prescribed number in a prescribed order to form a green laminate. Then, the green laminate is cut into a prescribed size. Thereafter, a binder is removed from the green laminate, and then the green laminate is burned to obtain the multilayered piezoelectric element. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
