| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device having high resolution, and a wide scanning region (observational visual field). SOLUTION: A means to adjust a focus, a means 45 to adjust astigmatism, a means to control and detect a scanning position, and a means to simultaneously control focus adjustment and astigmatism adjustment are provided, and achieving high resolution and securing a wide range of the observational visual field are made compatible. COPYRIGHT: (C)2006,JPO&NCIPI
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