| 摘要 |
PROBLEM TO BE SOLVED: To enable to manufacture a sample having a high reliability at EDX (energy dispersion type X-ray dispersion spectrometer) analysis, and capable of standing a high-magnification observation, for a sample manufacturing device enabling analysis and observation of a micro region by extracting a micro sample from an original sample with the use of an FIB (focused ion beams). SOLUTION: The focused ion beam processing device includes a focused ion beam irradiation means, and a sample base for fixing a sample for irradiating focused ion beams from the focused ion beam irradiation means. At least a surface of the sample base is made of carbon. Further, at least a surface of the sample base for fixing the sample irradiated with the focused ion beams consists of at least a kind selected from carbon, conductive polymer material, carbon fiber, glassy carbon, polymer material and carbon slim rods. COPYRIGHT: (C)2006,JPO&NCIPI
|
