| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope conducting highly precise three-dimensional analysis using low acceleration voltage. SOLUTION: Conversion electrodes 21a-21d divided into four are arranged closer to an electron source than a secondary electron detector 12. The conversion electrode 21a is arranged higher than an undersurface (sample side) of an objective lens, a reflection electron 23a colliding on the conversion electrode 21a is converted into a secondary electron 23b, and captured by a secondary electron detector 12a near the conversion electrode 21a. Similarly, a reflection electron 23a colliding on the conversion electrode 21b is converted into a secondary electron 23b and captured by a secondary electron detector 12b, a reflection electron 23a colliding on the conversion electrode 21c is converted into a secondary electron 23b and captured by a secondary electron detector 12c, and a reflection electron 23a colliding with the conversion electrode 21d is converted into a secondary electron 23b and captured by a secondary electron detector 12d. COPYRIGHT: (C)2006,JPO&NCIPI
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