| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface plate for polishing excellent in sharpness, hard to cause biased abrasion and capable of grinding a grinding material with favorable flatness. SOLUTION: This surface plate 1 for polishing is formed by fastening a large number of pellets 5 on a base plate 3. The pellets are arranged with roughly equal intervals on five concentric circumferences. The pellets 8, 16 formed in annular type rings and relatively low in abrasion resistance are arranged in rows 7, 15 on the extreme inner peripheral side and the extreme outer peripheral side to be a region where a workload for the grinding material is relatively small, and the pellets 10, 12, 14 relatively high in abrasion resistance on a disc are arranged in rows 9, 11, 13 of a central part where the work load for the grinding material is relatively large. COPYRIGHT: (C)2006,JPO&NCIPI
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