| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid supplying means and its operation method by which contamination of pure water with metals due to elution of metallic ions from a liquid supplying pump can be prevented in the liquid supplying means equipped with the metallic liquid supplying pump. SOLUTION: Two routes of liquid supplying pipes 11, 12 which are connected in parallel with each other and are capable of regulating flow rate are provided at the liquid supplying means 3 for supplying pure water from a storage tank 2 to an ultrapure water production unit 4. The liquid supplying pipes 11, 12 are respectively provided with liquid supplying pumps 13, 14. Further the liquid supplying means 3 is provided with a controller 40 which is equipped with an inverter for regulating and controlling the flow rate in the liquid supplying pipes 11, 12 and which serves as a flow rate regulating means and a controlling means. Two liquid supplying pumps 13, 14 are always operated with low output and thereby even when abnormality occurs at the liquid supplying pump, liquid contaminated with metals stays in the liquid supplying pumps 13, 14 and is prevented from being supplied to the ultrapure water production unit 4. COPYRIGHT: (C)2006,JPO&NCIPI
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