发明名称 |
Methods and systems for semiconductor defect detection |
摘要 |
A method for semiconductor defect detection, applied to a wafer test in a semiconductor process. A defect test is implemented for generating redundant information. an abnormal test implemented for generating a first FBM. The redundant information is converted to a second FBM. The first and second FBMs are compared, thereby generating a third FBM according to comparison results.
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申请公布号 |
US2006143550(A1) |
申请公布日期 |
2006.06.29 |
申请号 |
US20050203236 |
申请日期 |
2005.08.15 |
申请人 |
POWERCHIP SEMINCONDUCTOR CORP. |
发明人 |
LIU TONG-YU;CHANG YEN-SHENG |
分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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