| 摘要 |
The present invention relates to an oscillating shielded cylindrical target assembly comprising a cylindrical target, a motor assembly adapted to oscillate the cylindrical target, a shield, and a magnet assembly. Embodiments of the present invention also include a cylindrical target that has an outer surface containing a plurality of divided sections; the sections being disposed lengthwise around the target to form strips running lengthwise across the target. Each section includes a single sputtering material, such as silver, titanium, or niobium, that is intended to be applied as a separate coating on a substrate, such as glass.
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