发明名称 PATTERN FORMING METHOD AND ELECTRONIC CIRCUIT MANUFACTURED BY SAME
摘要 <p>A low cost pattern forming method having a low environmental load, an electronic circuit manufactured by the pattern forming method, and an electronic device using the electronic circuit. The pattern forming method is provided with a step of forming reflection preventing layers (22, 23) on one main plane of a transparent substrate (20); a step of forming an opening section by irradiating the reflection preventing layers (22, 23) with a first laser beam (26); a step of forming a mask layer (28) on the transparent substrate (20) and the reflection preventing layers (22, 23); a step of forming an opening section on the mask layer (28); a step of forming a first thin film layer (32) on the reflection preventing layers (22, 23) and the mask layer (28); and a step of peeling the mask layer (28) from the transparent substrate (20).</p>
申请公布号 WO2006068153(A1) 申请公布日期 2006.06.29
申请号 WO2005JP23404 申请日期 2005.12.20
申请人 ASAHI GLASS CO., LTD.;SATOH, RYOHEI;IWATA, YOSHINORI;NAKAGAWA, KOJI;TANAKA, KENJI;TAKAKI, SATORU 发明人 SATOH, RYOHEI;IWATA, YOSHINORI;NAKAGAWA, KOJI;TANAKA, KENJI;TAKAKI, SATORU
分类号 H01J9/02;H01J9/20;H01J11/02;H01J11/22;H01J11/34;H01J11/44 主分类号 H01J9/02
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