摘要 |
<p>A low cost pattern forming method having a low environmental load, an electronic circuit manufactured by the pattern forming method, and an electronic device using the electronic circuit. The pattern forming method is provided with a step of forming reflection preventing layers (22, 23) on one main plane of a transparent substrate (20); a step of forming an opening section by irradiating the reflection preventing layers (22, 23) with a first laser beam (26); a step of forming a mask layer (28) on the transparent substrate (20) and the reflection preventing layers (22, 23); a step of forming an opening section on the mask layer (28); a step of forming a first thin film layer (32) on the reflection preventing layers (22, 23) and the mask layer (28); and a step of peeling the mask layer (28) from the transparent substrate (20).</p> |
申请人 |
ASAHI GLASS CO., LTD.;SATOH, RYOHEI;IWATA, YOSHINORI;NAKAGAWA, KOJI;TANAKA, KENJI;TAKAKI, SATORU |
发明人 |
SATOH, RYOHEI;IWATA, YOSHINORI;NAKAGAWA, KOJI;TANAKA, KENJI;TAKAKI, SATORU |