发明名称 |
A FIBER OPTIC PRESSURE SENSOR FOR CATHETER USE |
摘要 |
The invention provides a miniature robust fiber optic pressure sensor. The miniature fiber optic sensor comprises a Fabry-Perot chip bonded to an optical fiber. The invention provides a new sensor design that reduces the amount of adhesive required to bond the optical fiber to the Fabry-Perot sensor such that the sensor is less sensitive to moisture. The invention also provides manufacturing methods of the sensor comprising a method based on etching and a method based on using an excimer laser. The invention also provides a chip design that renders the chip less sensitive to thermal changes. The invention also provides a chip design in which a sensor diaphragm has a well-defined thickness. The invention also provides a chip design that protects the chip from etching. |
申请公布号 |
CA2591787(A1) |
申请公布日期 |
2006.06.29 |
申请号 |
CA20052591787 |
申请日期 |
2005.12.12 |
申请人 |
OPSENS INC. |
发明人 |
VAN NESTE, RICHARD;BELLEVILLE, CLAUDE;BUSSIERE, SYLVAIN |
分类号 |
G01L11/02;A61B5/0215;G01L7/08 |
主分类号 |
G01L11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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