THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL RANGE,申请号CA20052591530-传众专利搜索

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发明名称	THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL RANGE
摘要
申请公布号	CA2591530(A1)	申请公布日期	2006.06.29
申请号	CA20052591530	申请日期	2005.12.23
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	KAISER, NORBERT;YULIN, SERGIY;FEIGL, TORSTEN;BENOIT, NICOLAS
分类号	G02B5/08;G02B1/10;G21K1/06	主分类号	G02B5/08
代理机构		代理人
主权项
地址

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