| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor capable of detecting directly and individually biaxial or multiaxial direction components of a measuring force or an acceleration, and capable of attaining simplification and size reduction compared with conventional one. <P>SOLUTION: One side angled part of a structure 2A formed into a quadrangle of side constitutive elements 31, etc. is fixed to a moving member 6, and a stylus 5 is attached to the other side angled part. Parallel link mechanisms 31Z, 32Z are formed in the pair of side constitutive elements 31, 32 to displace a stylus side end thereof in parallel along a Z-axial direction with respect to an antistylus side end. Parallel link mechanisms 41X, 42X, and 41Y, 42Y are formed in the other pair of side constitutive elements 41, 42 to displace stylus side ends thereof in parallel respectively along an X-axial direction and a Y-axial direction with respect to antistylus side ends. Each parallel link mechanism includes elastic hinge parts 35Z in at least two portions formed thin-walledly in the constitutive element, and two link pieces 36Z formed between the two elastic hinge parts 35Z. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
