| 摘要 |
A device ( 2 ) for inspecting a matrix substrate ( 26 ) includes a light source ( 22 ), an electro-optical device ( 20 ) determining whether light beams penetrate through or not, a photodetector ( 23 ) positioned at one side of the electro-optical device and a host computer ( 24 ) connected with the photodetector. A matrix substrate is positioned between the electro-optical device and the light source. The device is used to receive image data, and then the image data is compared with the predefined data to determine whether defects on the matrix substrate exist. Efficiency of inspection can be significantly improved. A related method is also provided.
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