DEVICE AND METHOD FOR HOLDING OR TRANSPORTING A SUBSTRATE

摘要

Device (1) for holding a substrate, comprising a box (2) and a substrate holder (4). The box (2) is arranged for holding the substrate holder (4), and the substrate holder (4) is arranged for holding the substrate (3). The box (2) comprises a gettering device (5) for gettering an impurity possibly being present within the box (2).