| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor having a regular fine structure capable of improving the uniformity of the temperature distribution of a substrate to be treated and its manufacturing method. SOLUTION: In the susceptor, a surface is formed in a shape that recesses designed in the same form are arrayed regularly, the shape of the recesses is formed in a hemispherical form and the regularly arrayed hemispherical recesses are connected mutually. The susceptor is formed by a process in which corpuscles 202 composed of a first material are arrayed regularly in two dimensions on the substrate 201, the process in which air gaps formed of the substrate 201 and the corpuscles 202 are filled with a substance 203 consisting of a second material and the substance 203 is cured as required, and the process in which the corpuscles 202 are removed. A film 205 composed of a third material is formed on the surface of the substance 203 consisting of the second material as required. COPYRIGHT: (C)2006,JPO&NCIPI |
