发明名称 Passivation structure for semiconductor devices
摘要 A system and method for providing a passivation structure for semiconductor devices is provided. In an embodiment, the passivation structure comprises a first barrier layer and a second barrier layer, wherein the second barrier layer may comprise a material, such as cobalt and/or nickel, that is less pure than the first barrier layer. In another embodiment, a single gradient barrier layer is formed. In this embodiment the single gradient barrier layer exhibits a greater pure conductive material, such as cobalt and/or nickel, nearer the conductive line than near the surface.
申请公布号 US2006138668(A1) 申请公布日期 2006.06.29
申请号 US20040023296 申请日期 2004.12.27
申请人 SU HUNG-WEN;SHIH CHIEN-HSUEH;TSAI MINGHSING;SHUE SHAU-LIN;YU CHEN-HUA 发明人 SU HUNG-WEN;SHIH CHIEN-HSUEH;TSAI MINGHSING;SHUE SHAU-LIN;YU CHEN-HUA
分类号 H01L23/06 主分类号 H01L23/06
代理机构 代理人
主权项
地址
您可能感兴趣的专利