发明名称 Ultrasonic washing apparatus and ultrasonic washing method
摘要 This is an ultrasonic washing technique to enhance, when an object to be washed is subjected to ultrasonic washing, the efficiency of charging and discharging the object to be washed in and out of a washing tank while preventing the apparatus from getting larger in the vertical direction. An inlet and an outlet are provided on the side wall of the washing tank, with closable doors and, after the object to be washed, carried along an upstream shift route is put in through the inlet, it is shut with the door for into a sealed closure, cleaning liquid deaerated in a storage tank is let into a washing tank to subject the object to be washed to ultrasonic washing. After that, the cleaning liquid in the washing tank is returned to the storage tank and the door of the outlet is opened to discharge sideways the object to be washed through the outlet via a downstream shift route
申请公布号 US2006137727(A1) 申请公布日期 2006.06.29
申请号 US20050530623 申请日期 2005.11.21
申请人 STAR CLUSTER CO. LTD. 发明人 SHIBANO MIYUKI;OKUNO SHIN;SAKAIBARA MASATO
分类号 B08B3/00;B08B3/04;B08B3/10;B08B3/12;C23G5/00;H01L21/00 主分类号 B08B3/00
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