发明名称 Ferroelectric film, method of manufacturing ferroelectric film, ferroelectric capacitor, and ferroelectric memory
摘要 A ferroelectric film having a ferroelectric shown by a general formula (Pb<SUB>1-d</SUB>Bi<SUB>d</SUB>)(B<SUB>1-a</SUB>X<SUB>a</SUB>)O<SUB>3</SUB>, B including at least one of Zr and Ti, X including at least one of Nb and Ta, "a" being in a range of "0.05<=a<=0.4", and "d" being in a range of "0<d<1".
申请公布号 US2006138507(A1) 申请公布日期 2006.06.29
申请号 US20050316168 申请日期 2005.12.22
申请人 SEIKO EPSON CORPORATION 发明人 KIJIMA TAKESHI;HAMADA YASUAKI;KOBAYASHI TOMOKAZU;MIYAZAWA HIROMU
分类号 H01L29/94 主分类号 H01L29/94
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