| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress deformation of a supporting substrate by reducing film stress of a piezoelectric being deposited on the electrode of the supporting substrate. <P>SOLUTION: The piezoelectric actuator 60 is constituted by depositing a PZT film 68 having a thickness of 10 μm on the electrode 64 of a diaphragm 62 having a thickness of 10-20 μm by aerosol deposition (AD method), and a PZT film 66 having a thickness of ≥0.5 μm deposited by sputtering is interposed between the electrode 64 and the PZT film 68 of AD film. Since the PZT film 66 of sputtered film is composed of a material having composition identical to that of the PZT film 68 of AD film, compressive stress is not stored on the interface to the PZT film 68, and film stress of the PZT film 68 can be reduced. Since the PZT film 66 functions as a stress relax layer and exhibits low film stress and strong film adhesion, it also functions as a layer for enhancing adhesion of the PZT film 68 of AD film. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
